MEMS heterogeneous packaged broadband electromagnetic induction vibration sensor and remote temperature sensor for industrial intelligent manufacturing

In this work, we provide self-powered vibration sensor with broadband vibration sensing capability of 20 Hz ~ 2000 Hz by vertical assembly of 3D coils and magnet without conventional deep-etching process, remote/ contactless temperature sensor (20 °C ~ 160 °C) under

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Bibliographic Details
Main Authors: Yu-Sheng Lai, Shao-Hui Hsu, Chun-Chi Chen, Meiyi Li, Ju-Mei Lu, Hsu-Chun Cheng, Jui-Min Liu, Yen-Chang Chen, Yu-Tsung Tuan, Cheng-San Wu, Jia-Min Shieh, Wen-Kuan Yeh
Format: Conference Proceeding
Language:English
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Summary:In this work, we provide self-powered vibration sensor with broadband vibration sensing capability of 20 Hz ~ 2000 Hz by vertical assembly of 3D coils and magnet without conventional deep-etching process, remote/ contactless temperature sensor (20 °C ~ 160 °C) under
ISSN:2156-017X
DOI:10.1109/IEDM.2017.8268527