100 nT/√Hz, 0.5 mm2 monolithic, multi-loop low-power 3-axis MEMS magnetometer

The work proposes the first monolithic, 3-axis, multi-loop MEMS Lorentz-force magnetometer. The sensor is studied to be compatible for 6-degrees-of-freedom (DOF), all-MEMS combos (with a 3-axis accelerometer), and more convenient in terms of cost/area than hybrid solutions. The structure exploits an...

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Bibliographic Details
Main Authors: Marra, Cristiano R., Laghi, Giacomo, Gadola, Marco, Gattere, Gabriele, Paci, Dario, Tocchio, Alessandro, Langfelder, Giacomo
Format: Conference Proceeding
Language:English
Subjects:
Magnetic resonance
Magnetic separation
Magnetic tunneling
Magnetometers
Micromechanical devices
Sensors
Online Access:Request full text
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Summary:The work proposes the first monolithic, 3-axis, multi-loop MEMS Lorentz-force magnetometer. The sensor is studied to be compatible for 6-degrees-of-freedom (DOF), all-MEMS combos (with a 3-axis accelerometer), and more convenient in terms of cost/area than hybrid solutions. The structure exploits an innovative geometry, which enables - though using 10 current-recirculating loops as a Lorentz-force multiplicative factor - to combine in a single device the sensitivity along all three sensing axes. This in turn generates an 8-fold active area reduction in the magnetic sensor, while halving noise density down to 100 nT/√Hz, with respect to previous solutions based on multi-loop architecture.
ISSN:2160-1968
DOI:10.1109/MEMSYS.2018.8346493