MEMS gyro drift compensation using multiple rate measurements derived from a single resonator

Axisymmetric resonators possess multiple pairs of nominally degenerate modes, each of which can be configured as a Corilois vibratory gyro. In this paper we report a technique to extract simultaneous angular rate measurements from the same resonator. Specifically, both of the n = 2 and n = 3 pairs o...

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Bibliographic Details
Main Authors: Ge, Howard H., Behbahani, Amir H., M'Closkey, Robert T.
Format: Conference Proceeding
Language:English
Subjects:
bias self-calibration
Correlation
Electrodes
Gain control
Gyroscopes
inertial sensors
MEMS
Micromechanical devices
mode-matched resonators
Performance evaluation
Resonant frequency
Sensors
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Summary:Axisymmetric resonators possess multiple pairs of nominally degenerate modes, each of which can be configured as a Corilois vibratory gyro. In this paper we report a technique to extract simultaneous angular rate measurements from the same resonator. Specifically, both of the n = 2 and n = 3 pairs of modes in a disk resonator are configured to yield measurements of angular rate. Although the short-term noise is uncorrelated between these rate measurements, the long-term drifts show very strong correlation. A technique is implemented to fuse the two measurements into a single estimate of rate with much lower drift thereby providing a technique for in-situ bias drift compensation.
ISSN:2153-3598
DOI:10.1109/PLANS.2018.8373393