Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays

In this paper, work is described on the fabrication of highly uniform 8/spl times/8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL's). Oxide-confined VCSEL arrays show an average threshold current of 0.74/spl plusmn/0.02 mA, an average output power of 2.05/spl plusmn/0.03...

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Bibliographic Details
Published in:IEEE photonics technology letters 2000-05, Vol.12 (5), p.459-461
Main Authors: Eitel, S., Fancey, S.J., Gauggel, H.-P., Gulden, K.-H., Bachtold, W., Taghizadeh, M.R.
Format: Article
Language:English
Subjects:
Arrays
Beams (radiation)
Conversion
Devices
Lenses
Microlenses
Microoptics
Optical arrays
Optical device fabrication
Power conversion
Power generation
Surface emitting lasers
Threshold current
Threshold currents
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
Wavelength measurement
Wavelengths
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Summary:In this paper, work is described on the fabrication of highly uniform 8/spl times/8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL's). Oxide-confined VCSEL arrays show an average threshold current of 0.74/spl plusmn/0.02 mA, an average output power of 2.05/spl plusmn/0.03 mW at 8 mA and an average power conversion efficiency of 14.3%. Their wavelength is measured to be 967/spl plusmn/0.35 nm over the array. In addition, we describe the alignment and integration of these device arrays with arrays of refractive microlenses to allow beam shaping typically required in system applications.
ISSN:1041-1135
1941-0174
DOI:10.1109/68.841252