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Thermal conductivity of Si/Ge superlattices

We report in this paper the thermal conductivity measurement of Si/Ge superlattices as a function of the temperature and the period thickness. The symmetrized Si/Ge superlattices are grown by MBE on Si substrates with a graded buffer layer. A comparative 3/spl omega/ method is used to measure the th...

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Main Authors: Borca-Tasciuc, T., Weili Liu, Jianlin Liu, Taofang Zeng, Song, D.W., Moore, C.D., Gang Chen, Wang, K.L., Goorsky, M.S., Radetic, T., Gronsky, R., Xiangzhong Sun, Dresselhaus, M.S.
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creator Borca-Tasciuc, T.
Weili Liu
Jianlin Liu
Taofang Zeng
Song, D.W.
Moore, C.D.
Gang Chen
Wang, K.L.
Goorsky, M.S.
Radetic, T.
Gronsky, R.
Xiangzhong Sun
Dresselhaus, M.S.
description We report in this paper the thermal conductivity measurement of Si/Ge superlattices as a function of the temperature and the period thickness. The symmetrized Si/Ge superlattices are grown by MBE on Si substrates with a graded buffer layer. A comparative 3/spl omega/ method is used to measure the thermal conductivity of the buffer and the superlattices between 80K-300K. The thermal conductivity is carried out in conjunction with X-ray and TEM sample characterization. The measured thermal conductivity values are lower than that of their corresponding alloys and show a decreasing trend with increasing period thickness which are corroborated with the TEM characterization of the dislocation density.
doi_str_mv 10.1109/ICT.1999.843368
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ispartof Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407), 1999, p.201-204
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language eng
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source IEEE Xplore All Conference Series
subjects Conducting materials
Conductivity measurement
Gallium arsenide
Materials science and technology
Molecular beam epitaxial growth
Superlattices
Temperature
Thermal conductivity
Thermal engineering
Thermoelectricity
title Thermal conductivity of Si/Ge superlattices
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