The Overview of the Impacts of Electron Radiation on Semiconductor Failure Analysis by SEM, FIB and TEM

The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk...

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Bibliographic Details
Main Authors: Liu, Binghai, Hua, Younan, Dong, Zhili, Tan, Pik Kee, Zhao, Yuzhe, Mo, Zhiqiang, Lam, Jeffrey, Mai, Zhihong
Format: Conference Proceeding
Language:English
Subjects:
Atomic measurements
electron beam radiation
electron beam sensitive
Electron beams
Failure analysis
FIB
radiation damage
Scanning electron microscopy
Scattering
SEM
Strain
TEM
Online Access:Request full text
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Summary:The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials.
ISSN:1946-1550
DOI:10.1109/IPFA.2018.8452485