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Helium-Based Refractometry for Pressure Measurements in the Range 1-100 kPa

This paper describes an alternative of pressure measurements based on a helium absolute refractometer at 532 nm. The Fabry-Perot cavity has been characterized from relevant parameters and the resolution in pressure of this new optical pressure sensor is lower than 0.2 Pa.

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Bibliographic Details
Main Authors: Silvestri, Zaccaria, Boineau, Frederic, Otal, Pierre, Wallerand, Jean-Pierre
Format: Conference Proceeding
Language:English
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Online Access:Request full text
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Description
Summary:This paper describes an alternative of pressure measurements based on a helium absolute refractometer at 532 nm. The Fabry-Perot cavity has been characterized from relevant parameters and the resolution in pressure of this new optical pressure sensor is lower than 0.2 Pa.
ISSN:2160-0171
DOI:10.1109/CPEM.2018.8501259