A Numerical Simulation of the Photoelectric Pressure Sensor Optomechanical Unit

In the paper a numerical model of an optomechanical unit of a photoelectric pressure sensor consisting of a profiled silicon diaphragm with a rigid center, an additional die with a rigid center and an optical fiber is presented. Using the finite element modeling method, the conditions of maximum sen...

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Bibliographic Details
Main Authors: Chernov, Artyom S., Gridchin, Victor A.
Format: Conference Proceeding
Language:English
Subjects:
elastic element
Finite element analysis
optic fiber
Optical fiber sensors
Optical fibers
optomechanical unit
photoelectric pressure sensor
Pressure sensors
rigid center
Silicon
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Summary:In the paper a numerical model of an optomechanical unit of a photoelectric pressure sensor consisting of a profiled silicon diaphragm with a rigid center, an additional die with a rigid center and an optical fiber is presented. Using the finite element modeling method, the conditions of maximum sensitivity of the deflection of the optical fiber free end from applied pressure depending on the size of the diaphragm and the positions of the rigid centers are investigated. The nonlinearity problems of the conversion characteristic of the optomechanical unit are considered.
ISSN:2473-8573
DOI:10.1109/APEIE.2018.8545852