MEMS-Based Tunable Grating Coupler

We demonstrate a microelectromechanical-system-based tunable grating coupler capable of changing the central wavelength. The grating structure is fabricated on a suspended cantilever with supporting arms and can be tuned by an applied voltage. We demonstrate a tunable range of 22.8 nm under actuatio...

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Bibliographic Details
Published in:IEEE photonics technology letters 2019-01, Vol.31 (2), p.161-164
Main Authors: Yu, Wen, Gao, Shengqian, Lin, Yusheng, He, Mingbo, Liu, Liu, Xu, Jian, Luo, Yannong, Cai, Xinlun
Format: Article
Language:English
Subjects:
Actuation
Couplers
Critical components
grating coupler
Gratings
MEMS-based tunable grating
Microelectromechanical systems
Micromechanical devices
Silicon
Silicon photonics
Substrates
Tuning
Voltage measurement
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Summary:We demonstrate a microelectromechanical-system-based tunable grating coupler capable of changing the central wavelength. The grating structure is fabricated on a suspended cantilever with supporting arms and can be tuned by an applied voltage. We demonstrate a tunable range of 22.8 nm under actuation voltages of up to 12 V in the present devices. In addition, we show that the supporting arms are critical components that can be used to effectively avoid the pull-in effect.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2018.2887254