Simulation, Making and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate

The simulation of the actuator based on lithium niobate bidomain structure was carried out. The dependencies of the values of actuator displacements on its geometrical dimensions and the applied voltages were determined. Particularly, it is shown that the dependence of the displacement on the applie...

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Bibliographic Details
Main Authors: Buryy, Oleh, Sugak, Dmytro, Syvorotka, Ihor, Yakhnevych, Uliana, Suhak, Yuriy, Ubizskii, Sergii, Fritze, Holger
Format: Conference Proceeding
Language:English
Subjects:
Actuators
bidomain structure
Crystals
Interferometric lithography
Lithium niobate
Micromechanical devices
positioning devices
Simulation
Thick films
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Summary:The simulation of the actuator based on lithium niobate bidomain structure was carried out. The dependencies of the values of actuator displacements on its geometrical dimensions and the applied voltages were determined. Particularly, it is shown that the dependence of the displacement on the applied voltage is linear in the whole investigated range (-300... 300V). Based on the simulation results, an actuator was manufactured from the oppositely polarized plates of congruent lithium niobate connected by diffusion of copper from the film placed between the plates. It was found that the displacement of this actuator is equal to 9 nm upon the applied voltage of 1 V, and to 26.5 nm upon 3 V.
ISSN:2573-5373
DOI:10.1109/MEMSTECH.2019.8817401