Ultra-fine Particulate Detection using Mode-localized MEMS Resonators

This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant...

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Bibliographic Details
Main Authors: Chellasivalingam, Malar, Pandit, Milind, Kalberer, Markus, Seshia, Ashwin A.
Format: Conference Proceeding
Language:English
Subjects:
Acoustics
amplitude ratio
Atmospheric measurements
coupled MEMS resonators
Frequency response
Lame mode
mass sensor
Micromechanical devices
mode localization
piezoelectric bulk acoustic resonators
Resonant frequency
Resonators
Sensitivity
ultra-fine particulate matter
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Description
Summary:This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.
ISSN:2327-1949
DOI:10.1109/FCS.2019.8856014