On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow

It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet ligh...

Full description

Saved in:
Bibliographic Details
Main Authors: Vodopyanov, Alexander V., Sidorov, Alexander V., Veselov, Alexey P., Kubarev, Vitaly V., Shevchenko, Oleg A., Gorbachev, Yaroslav I.
Format: Conference Proceeding
Language:English
Subjects:
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.
ISSN:2162-2035
DOI:10.1109/IRMMW-THz.2019.8874193