On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow
It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet ligh...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography. |
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ISSN: | 2162-2035 |
DOI: | 10.1109/IRMMW-THz.2019.8874193 |