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Gate Oxide Process for III-V / Si Hybrid MOS Capacitor Modulator
The following topics are dealt with: elemental semiconductors; silicon; optical waveguides; integrated optoelectronics; integrated optics; germanium; optical losses; optical resonators; optical modulation; silicon compounds.
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Main Authors: | , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | The following topics are dealt with: elemental semiconductors; silicon; optical waveguides; integrated optoelectronics; integrated optics; germanium; optical losses; optical resonators; optical modulation; silicon compounds. |
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ISSN: | 1949-209X |
DOI: | 10.1109/GROUP4.2019.8925975 |