Design of a phase-shifting optical feedback interferometer using an electrooptic modulator

A laser sensor using optical feedback interferometry has been designed to measure displacements up to several micrometers. For this purpose, a lithium niobate crystal generates a phase shift in order to modulate at a frequency of 580 kHz the optical path difference between the sensor and the target....

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2000-09, Vol.6 (5), p.798-802
Main Authors: Servagent, N., Bosch, T., Lescure, M.
Format: Article
Language:English
Subjects:
Calibration
Crystals
Displacement measurement
Interferometric lithography
Laser feedback
Lasers
Lithium niobate
Micrometers
Modulators
Optical design
Optical feedback
Optical fibers
Optical interferometry
Optical sensors
Phase modulation
Phase shifting interferometry
Sensors
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Summary:A laser sensor using optical feedback interferometry has been designed to measure displacements up to several micrometers. For this purpose, a lithium niobate crystal generates a phase shift in order to modulate at a frequency of 580 kHz the optical path difference between the sensor and the target. This setup has been calibrated by means of a commercial optical fiber sensor. The overall accuracy resulting is better than 65 nm for a 1-kHz sinusoidal motion of the target at 10 cm away from the sensor.
ISSN:1077-260X
1558-4542
DOI:10.1109/2944.892620