The world of micro-optics

Micro-optical elements are optical components with structures in the sub-mm and sub-/spl mu/m range, which are fabricated by a variety of high-resolution lithographic and optical processes. Micro-optics includes free-space optics, integrated optics, semiconductor light sources and detectors. This ov...

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Bibliographic Details
Main Author: Herzig, H.P.
Format: Conference Proceeding
Language:English
Subjects:
Biomedical optical imaging
Costs
Glass
Integrated optics
Light sources
Optical devices
Optical materials
Optical propagation
Semiconductor materials
Silicon compounds
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Description
Summary:Micro-optical elements are optical components with structures in the sub-mm and sub-/spl mu/m range, which are fabricated by a variety of high-resolution lithographic and optical processes. Micro-optics includes free-space optics, integrated optics, semiconductor light sources and detectors. This overview concentrates on free-space micro-optics where the light propagates in 3D. Data for arbitrary phase profiles can be transformed into efficient optical elements. These elements are made of rigid materials, such as glass and fused silica, or they are replicated at low cost into plastic and epoxy materials. Micro-optical elements are used in various applications, ranging from illumination to medicine. Some examples are presented.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2000.894004