Quantum well intermixing technologies for quasi-phase-matching gratings

Most of the studies carried out to date on the spatial selectively of the quantum well intermixing process have involved characterising either large intermixed areas, or sub 1 /spl mu/m features for 1D and 0D confinement potentials. Features that lie in the range of 1-10 /spl mu/m are of interest be...

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Bibliographic Details
Main Authors: Helmy, A.S., Hutchings, D.C., Kleckner, T.C., Aitchison, J.S., Bryce, A.C., Marsh, J.H., Martin, P., Landesman, J.P., Brown, C.T.A., Moutzouris, K., Ebrahimzadeh, M., Ayling, S.G.
Format: Conference Proceeding
Language:English
Subjects:
Area measurement
Chemical technology
Chemical vapor deposition
Frequency conversion
Gallium arsenide
Gratings
Plasma chemistry
Plasma waves
Stress measurement
Superlattices
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Summary:Most of the studies carried out to date on the spatial selectively of the quantum well intermixing process have involved characterising either large intermixed areas, or sub 1 /spl mu/m features for 1D and 0D confinement potentials. Features that lie in the range of 1-10 /spl mu/m are of interest because they can be used to realise various devices such as waveguides, and domain disordering for quasi-phase matching (QPM). In this paper different technologies were investigated to fabricate QPM gratings in GaAs/AlAs superlattice waveguides.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2000.894052