Technological Sensor on Coupled Radial Spirals

We present the sensor with a sensitive element (SE) based on coupled radial spirals, which can be used for monitoring technological processes in the Electronic Industry, as well as for detecting damages on the pipelines under protective coatings. The main properties and characteristics of such SE ar...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2020-03, Vol.67 (3), p.1165-1170
Main Authors: Pchelnikov, Yuriy N., Yelizarov, Andrey A.
Format: Article
Language:English
Subjects:
Cracks
Damage detection
Electrodynamics
Electromagnetic fields
Ion implantation
Metal surfaces
Metallizing
Monitoring
pierce oscillator
Protective coatings
radial spirals
RF and microwave measurements
sensitive element (SE)
Sensors
slow-wave structure (SWS)
slowdown
Spirals
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Summary:We present the sensor with a sensitive element (SE) based on coupled radial spirals, which can be used for monitoring technological processes in the Electronic Industry, as well as for detecting damages on the pipelines under protective coatings. The main properties and characteristics of such SE are analyzed and measured. It is shown that the concentration of the electromagnetic field in a measuring space, caused by slowing down of the the wave, and splitting of the electric and magnetic fields leads to a significant increase in sensitivity, whereas the multiple increases in the slowdown makes it possible to use the advantages of SE with distributed parameters at relatively low operating frequencies. The practical realization of the described sensor is demonstrated in measuring the ion implantation processes and the thickness of the metallization, as well as in monitoring the invisible cracks and damages through the protective coats on the metal surfaces.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2020.2965448