A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4

In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium niobate (LiNbO 3 ) thin films with electromechanical coupling coefficients ( k^{2} ) as large as 46.4%, exceeding the state-of-the-art. The achievable k^{2} of A1 in LiNbO 3 substrates of different orient...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2020-06, Vol.29 (3), p.313-319
Main Authors: Lu, Ruochen, Yang, Yansong, Link, Steffen, Gong, Songbin
Format: Article
Language:English
Subjects:
5G mobile communication
5G new radio
acoustic resonators
Acoustics
Broadband
Coupling coefficients
Couplings
Lamb wave
Lithium niobate
Lithium niobates
microelectromechanical devices
Optimization
piezoelectric devices
Q factors
Resonators
Substrates
Thin films
Wideband
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Summary:In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium niobate (LiNbO 3 ) thin films with electromechanical coupling coefficients ( k^{2} ) as large as 46.4%, exceeding the state-of-the-art. The achievable k^{2} of A1 in LiNbO 3 substrates of different orientations is first explored, showing X-axis direction in 128° Y-cut LiNbO 3 among the optimal combinations. Subsequently, A1 resonators with spurious mode mitigation are designed and fabricated. In addition to the large k^{2} , the implemented devices show a maximum quality factor ( Q ) of 598 at 3.2 GHz. Upon further optimization, the reported platform can potentially deliver a wideband acoustic-only filtering solution in 5G New Radio. [2020-0003]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2020.2982775