Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing

This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS resonator array for ultrafine aerosol particulate sensing. The mass balancing technique enables the lifetime extension of such real-time particulate sensors without employing any wet or dry-cleaning techni...

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Bibliographic Details
Main Authors: Chellasivalingam, Malar, Graves, Brian, Boies, Adam, Seshia, Ashwin A.
Format: Conference Proceeding
Language:English
Subjects:
cleaning particles
common-mode rejection
Loading
mass balancing
mass tuning
Mechanical sensors
Micromechanical devices
piezoelectric MEMS
Q factor
sensor lifetime
Sensor systems
Switches
Temperature
Temperature sensors
weak coupling
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Summary:This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS resonator array for ultrafine aerosol particulate sensing. The mass balancing technique enables the lifetime extension of such real-time particulate sensors without employing any wet or dry-cleaning techniques to remove particles from the resonators. This mass balancing is demonstrated for both the flexural and bulk modes of the same coupled resonator array occurring at ∼54kHz and ∼2.53MHz, respectively. This system also demonstrates for a degree of passive environment immunity to temperature effects by using an amplitude ratio output metric. The Q factor of the coupled MEMS resonator system do not degrade substantially with increased particulate loading.
ISSN:2160-1968
DOI:10.1109/MEMS46641.2020.9056426