CMOS-MEMS membrane for audio-frequency acoustic actuation

Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU. The ability to build a membrane directly...

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Bibliographic Details
Main Authors: Neumann, J.J., Gabriel, K.J.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic signal processing
Biomembranes
Cellular phones
CMOS process
Fabrication
Headphones
Hearing aids
Micromachining
Microphones
Prototypes
Online Access:Request full text
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Summary:Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with signal processing electronics will enable a variety of applications including economical earphones, microphones, hearing aids, high-fidelity earphones, cellular phones and noise cancellation. The large compliance of the CMOS-MEMS membrane also promises application as a sensitive microphone and pressure sensor.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2001.906522