Investigation of Test Structures for the Characterization of Very Fast Electro Static Discharge Events

New wafer technologies and chip design requirements are increasingly susceptible to damage from smaller Electro Static Discharge events (ESD). A new method is sought to evaluate ESD risk posed by processing equipment and the effectiveness of proposed upgrades. This paper proposes and investigates a...

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Bibliographic Details
Main Authors: Lauderdale, Matt, Onyegam, Emmanuel, Ruth, Scott, Gerdemann, Alex
Format: Conference Proceeding
Language:English
Subjects:
Chip scale packaging
Conferences
Discharges (electric)
Electrostatic discharges
Microelectronics
Production
Semiconductor device measurement
Online Access:Request full text
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Summary:New wafer technologies and chip design requirements are increasingly susceptible to damage from smaller Electro Static Discharge events (ESD). A new method is sought to evaluate ESD risk posed by processing equipment and the effectiveness of proposed upgrades. This paper proposes and investigates a packaged test structure designed to measure ESD events. The test chip would run in the place of production parts during equipment and package level process evaluations. A design is proposed, developed and preliminary test results demonstrating feasibility are shown.
ISSN:2158-1029
DOI:10.1109/ICMTS48187.2020.9107924