Verification and Induction Method for Low Frequency Response Failure Modes in Acoustic MEMS

In this paper we present a novel verification and induction method for low frequency response failure modes in MEMS microphones. Response from the device is captured before and after the occurrence of a defect present on the diaphragm of the microphone and induced by focus ion beam machining. The de...

Full description

Saved in:
Bibliographic Details
Main Authors: Hantos, Gergely, Marc P.Y., Desmulliez
Format: Conference Proceeding
Language:English
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper we present a novel verification and induction method for low frequency response failure modes in MEMS microphones. Response from the device is captured before and after the occurrence of a defect present on the diaphragm of the microphone and induced by focus ion beam machining. The deviation in the frequency response of the microphone shows a good agreement with analytical results.
ISSN:2158-1029
DOI:10.1109/ICMTS48187.2020.9107925