Impact of X-Ray Radiation on the Reliability of Logic Integrated Circuits

X-Ray imaging is widely used in the semiconductor industry, for failure analysis and for in-line inspection of surface mount devices. Here, we investigate the TID-induced degradation of logic ICs, which happens after long-term exposure to X-Ray. The observed degradation is mainly in the form of an i...

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Bibliographic Details
Main Authors: Rahimi, Somayyeh, Schmidt, Christian, Liao, Joy, Marks, Howard Lee, Mo Shin, Kyung
Format: Conference Proceeding
Language:English
Subjects:
Annealing
Degradation
IDDQ
Input/Output Leakage
Inspection
Integrated circuits
Pins
Ring Oscillator Frequency
Silicon
Surface Mount Technology
Total Ionizing Dose
Vmin
Voltage
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Description
Summary:X-Ray imaging is widely used in the semiconductor industry, for failure analysis and for in-line inspection of surface mount devices. Here, we investigate the TID-induced degradation of logic ICs, which happens after long-term exposure to X-Ray. The observed degradation is mainly in the form of an increase in the leakage of input/output pins and the IDDQ of their circuitry. Annealing at high temperature is shown to partially recover the leakage degradation caused by the radiation.
ISSN:1938-1891
DOI:10.1109/IRPS45951.2020.9128356