A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and dig...

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Bibliographic Details
Published in:IEEE sensors letters 2020-08, Vol.4 (8), p.1-4
Main Authors: Wang, Dingkang, Thomas, Lenworth, Koppal, Sanjeev, Ding, Yingtao, Xie, Huikai
Format: Article
Language:English
Subjects:
Actuation
Electric potential
electrothermal actuator
Engines
Laser radar
LiDAR
Microcontrollers
microelectromechanical (MEMS) mirror
Microelectromechanical systems
Micromechanical devices
Mirrors
Power demand
Power management
Projectors
Pulse width modulation
Resonant frequency
Sensor-actuators
Voltage
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Summary:Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.
ISSN:2475-1472
2475-1472
DOI:10.1109/LSENS.2020.3006813