Strontium titanate thin films for tunable YBa/sub 2/Cu/sub 3/O/sub 7/ microwave filters

Tunable ferroelectric thin films such as SrTiO/sub 3/ (STO) are promising for a variety of rf applications requiring tunability. We describe the growth and characterization of STO thin films including their dielectric properties, and summarize attempts at reducing the loss tangent of these films. We...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.450-453
Main Authors: Moeckly, B.H., Zhang, Y.
Format: Article
Language:English
Subjects:
Dielectric films
Dielectric losses
Dielectric thin films
Ferroelectric films
Ferroelectric materials
High temperature superconductors
Strontium
Superconducting thin films
Titanium compounds
Transistors
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Summary:Tunable ferroelectric thin films such as SrTiO/sub 3/ (STO) are promising for a variety of rf applications requiring tunability. We describe the growth and characterization of STO thin films including their dielectric properties, and summarize attempts at reducing the loss tangent of these films. We also discuss their integration with high-temperature superconductor (HTS) microwave filters for trimming purposes.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.919380