Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications

A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of 1\ \mu \mathrm{m} to 2\ \mu \mathrm{m} exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and diel...

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Bibliographic Details
Main Authors: Miyake, Ryoma, Kiuchi, Mario, Yoshida, Shinya, Tanaka, Shuji, Fox, Glen R.
Format: Conference Proceeding
Language:English
Subjects:
Electrodes
epitaxial
Epitaxial growth
Hysteresis
Micromechanical devices
piezoelectric
Piezoelectric devices
PZT
Silicon
sputtering
thin film
Voltage measurement
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Description
Summary:A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of 1\ \mu \mathrm{m} to 2\ \mu \mathrm{m} exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.
ISSN:2375-0448
DOI:10.1109/IFCS-ISAF41089.2020.9234898