A Hybrid Integration Platform of Silicon Photonics

In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.

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Bibliographic Details
Main Authors: Lin, Chien-chung, Huang, Chien-Ying, Ku, Kai-Ning, Chou, Kai-Wei, Chen, Ting-Hui, Chang, Po-Chih, Chen, Yu-Fang, Lin, Chen-Yu, Wang, Chung-Chih, Lee, Chi-Sen, Hsu, Chi-Hsiang, Chen, Shang-Chun
Format: Conference Proceeding
Language:English
Subjects:
fiber array couplers
full-wafer measurement
high speed modulator
high speed photodetector
High-speed optical techniques
laser sub-assembly
Optical device fabrication
Photodetectors
photonic package
Photonics
Semiconductor device measurement
Silicon
silicon photonics
Surface emitting lasers
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Description
Summary:In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.
ISSN:2166-8892
DOI:10.1109/OECC48412.2020.9273651