Optimization of thin-film YBa/sub 2/Cu/sub 3/O/sub 7/ deposition by DC sputtering onto sapphire substrates

A report is presented on the deposition of YBa/sub 2/Cu/sub 3/O/sub 7/ thin films onto epitaxial magnesia-coated single-crystal sapphire substrates at deposition temperatures in the range of 600 degrees C-850 degrees C. The dependence of film composition on sputtering parameters was investigated usi...

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Bibliographic Details
Published in:IEEE transactions on magnetics 1989-03, Vol.25 (2), p.2530-2533
Main Authors: Tomlinson, E.J., Barber, Z.H., Morris, G.W., Somekh, R.E., Evetts, J.E.
Format: Article
Language:English
Subjects:
Ceramics
Heat treatment
High temperature superconductors
Magnesium compounds
Magnetic films
Sputtering
Substrates
Superconducting epitaxial layers
Superconducting films
Superconducting magnets
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Summary:A report is presented on the deposition of YBa/sub 2/Cu/sub 3/O/sub 7/ thin films onto epitaxial magnesia-coated single-crystal sapphire substrates at deposition temperatures in the range of 600 degrees C-850 degrees C. The dependence of film composition on sputtering parameters was investigated using a UHV DC magnetron sputter deposition system with both composite metal and ceramic oxide targets. Films deposited onto epitaxial magnesia are compared to those deposited directly onto sapphire and yttria-stabilized zirconia. The degree of control required for the sputter deposition of YBaCuO thin films at elevated temperatures is shown.< >
ISSN:0018-9464
1941-0069
DOI:10.1109/20.92822