Micro-system process for education: fabrication of a pressure sensor

Micro-systems technology is a fast developing field that takes advantage of the well established Si microelectronics technology. In this paper we present the concepts and process flow of the technological elaboration of a pressure sensor. This approach places the emphasis on the key technologies of...

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Bibliographic Details
Main Authors: Montes, L., Palun, L., Morfouli, P., Mathieu, N., Guillemot, N., Descheneaux, S., Terrot, J.-M., Malhaire, C.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Chemical technology
Contacts
Doping
Educational technology
Fabrication
Lithography
Microelectronics
Sensor phenomena and characterization
Wet etching
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Summary:Micro-systems technology is a fast developing field that takes advantage of the well established Si microelectronics technology. In this paper we present the concepts and process flow of the technological elaboration of a pressure sensor. This approach places the emphasis on the key technologies of micro-systems and includes the use of double face photolithography as well as bulk micro-machining. It also benefits standard clean room equipment.
DOI:10.1109/MSE.2001.932429