Annealing effects on the structure of Ge-Sb-Te alloys

In the present study the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples are investigated after annealing temperatures ranging from room temperature up to 450°C. We performed the annealing procedure using a heat rate of 10 °C/s to achieve...

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Bibliographic Details
Main Authors: Cinkaya, Hatun, Hasekioglu, Arif Sirri Atilla, Kaya, Zahit Evren, Kalem, Seref, Charpin-Nicolle, Christelle, Bourgeois, Guillaume, Guillaume, Nicolas, Cyrille, Marie Claire, Nowak, Etienne, Navarro, Gabriele, Garrione, Julien
Format: Conference Proceeding
Language:English
Subjects:
Annealing
Ge-rich GST
Germanium
GST
Phase Change Materials
Raman scattering
Temperature measurement
Thermal Annealing
X-ray diffraction
X-ray scattering
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Summary:In the present study the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples are investigated after annealing temperatures ranging from room temperature up to 450°C. We performed the annealing procedure using a heat rate of 10 °C/s to achieve the target temperature for a duration of 10 minutes under N2 flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR) and Raman Spectroscopy measurements to investigate the evolution of the structure in the samples. We confirm the delayed crystallization and structure evolution at higher temperatures of Ge-rich samples with respect to standard GST.
ISSN:2472-9132
DOI:10.1109/EUROSOI-ULIS49407.2020.9365326