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Introducing 2D-FETs in Device Scaling Roadmap using DTCO
Superior electrostatic control of 2D-FETs enables continued logic power-performance-area (PPA) scaling beyond the 2nm node. Here, we show that WS 2 -based 2D devices give ~40% inverter performance boost against Si at imec 2nm node, using a process-aware DTCO approach. The DTCO is conducted based on...
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Main Authors: | , , , , , , , , , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Request full text |
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Summary: | Superior electrostatic control of 2D-FETs enables continued logic power-performance-area (PPA) scaling beyond the 2nm node. Here, we show that WS 2 -based 2D devices give ~40% inverter performance boost against Si at imec 2nm node, using a process-aware DTCO approach. The DTCO is conducted based on an ab-initio calibrated, physical compact model while area scaling is based on contacted gate pitch scaling. Side contacted source/drain, vertically-stacked 2D sheets and fork-sheet architecture are highlighted as key enablers of 2D-FET technology for multiple advanced nodes, using experimentally realistic mobility and Schottky barrier height conditions. |
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ISSN: | 2156-017X |
DOI: | 10.1109/IEDM13553.2020.9371906 |