Micro Thermal Flow Sensor for Ion Solution Based on the Monitoring of Slope of Impedance Changes

In this paper, a flexible and cost-effective micro thermal flow sensor based on the slope monitoring of electrochemical impedance changes is proposed for ion solution. Unlike the thermal flow sensors with thermo-resistive or thermoelectric transduction principles, the proposed flow sensor uses the e...

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Bibliographic Details
Main Authors: Fang, Zetao, Xu, Xuankai, Zheng, Jiufu, Zhang, Li, Yang, Yatao, Xu, Wei
Format: Conference Proceeding
Language:English
Subjects:
electrochemical impedance
Impedance
Ions
linear response
Monitoring
slope of impedance change
Temperature distribution
Temperature sensors
theoretical model
Thermal flow sensor
Thermistors
Transient analysis
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Description
Summary:In this paper, a flexible and cost-effective micro thermal flow sensor based on the slope monitoring of electrochemical impedance changes is proposed for ion solution. Unlike the thermal flow sensors with thermo-resistive or thermoelectric transduction principles, the proposed flow sensor uses the electrochemical impedance of ion solution as a thermistor to sense the temperature change aroused by the fluid flow. Based on this mechanism, the detection range of the fabricated micro flow sensor implemented on the PI substrate is from 0 μm/s to 1000 μm/s, and the overheating temperature is lower than 5 °C. Besides, a one-dimensional (1-D) transient theoretical model is proposed, which is in good agreement with the experimental data. This model will be used to optimize the impedance-based flow sensor performance with very low detection limits for ion solution in the future.
ISSN:2160-1968
DOI:10.1109/MEMS51782.2021.9375229