Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing

Pyroelectric IR detector is fabricated using ScAlN with 12% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitte...

Full description

Saved in:
Bibliographic Details
Main Authors: Ng, Doris K. T., Ho, Chong-Pei, Xu, Linfang, Zhang, Tantan, Siow, Li-Yan, Ng, Eldwin J., Cai, Hong, Zhang, Qingxin, Lee, Lennon Y. T.
Format: Conference Proceeding
Language:English
Subjects:
Absorption
CMOS-MEMS
CO 2 gas sensing
Detectors
Frequency measurement
infrared detector
Optical detectors
Optical device fabrication
Optical variables measurement
ScAlN pyroelectric detector
Wavelength measurement
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Pyroelectric IR detector is fabricated using ScAlN with 12% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitter with a sinusoidal input waveform. D* is measured to be as high as 1.87 x 10 7 (cm√Hz)/W at a frequency of 13 Hz. The optical absorptance of this device at 4.26 μm CO 2 gas absorption wavelength is around 0.75, measured using FTIR. CO 2 gas sensing measurement detects electrical signal changes of ~50-100 μV.
ISSN:2160-1968
DOI:10.1109/MEMS51782.2021.9375435