Study of subsurface damage in Ge optics machined by SPDT

Single point diamond turning (SPDT) allows to finish Ge surfaces with a high shape accuracy, low surface roughness and low subsurface damage. We use SPDT for X-ray crystal optics, which poses stringent requirements for surface quality. A study of the surface and subsurface properties of the nanomach...

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Bibliographic Details
Main Authors: Zaprazny, Z., Korytar, D., Zat'ko, B., Jergel, M., Halahovets, Y., Dobrovodsky, Jozef, Noga, Pavol
Format: Conference Proceeding
Language:English
Subjects:
Crystals
Germanium
Imaging
Optics
Rough surfaces
Surface finishing
Surface roughness
Online Access:Request full text
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Summary:Single point diamond turning (SPDT) allows to finish Ge surfaces with a high shape accuracy, low surface roughness and low subsurface damage. We use SPDT for X-ray crystal optics, which poses stringent requirements for surface quality. A study of the surface and subsurface properties of the nanomachined Ge crystal surfaces using AFM, micro-Raman imaging and RBS-channeling methods was done. A surface roughness of 0.9 nm (RMS) is shown in AFM image from 10 \times 10 \mu m^{2} area. The RBS-channeling as a complementary method to micro- Raman imaging confirmed, that no amorphous phase of Ge remains on the nanomachined surface and the crystallinity is very good up to the very surface.
ISSN:2474-9737
DOI:10.1109/ASDAM50306.2020.9393864