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Short failure analysis under fault isolation

Scanning superconducting quantum interference device (SQUID) microscopy, along with real time X-ray (RTX) microscopy and scanning acoustic microscopy (SAM), was used as a fault isolation tool for IC short circuit failure analysis. Fault isolation was carried out before physical analysis. Experimenta...

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Bibliographic Details
Main Authors: Mai, Z.H., Palaniappan, M., Chin, J.M., Soh, C.E., Knauss, L.A., Fleet, E.F.
Format: Conference Proceeding
Language:English
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Summary:Scanning superconducting quantum interference device (SQUID) microscopy, along with real time X-ray (RTX) microscopy and scanning acoustic microscopy (SAM), was used as a fault isolation tool for IC short circuit failure analysis. Fault isolation was carried out before physical analysis. Experimental procedures and results for both fault isolation and physical analysis are given in detail.
DOI:10.1109/IPFA.2001.941486