Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film

The paper reports on the micro-actuators based on 36Y-cut LiNbO 3 thin film. Two different designs of SiO 2 layer below (design 1) and above (design 2) LiNbO 3 thin film have been proposed and analyzed. The two micro-actuators both have a mirror size at 15×80 µm 2 . Through the analysis of different...

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Bibliographic Details
Main Authors: Liu, Yushuai, Gao, Zhiyuan, Liu, Kangfu, Wu, Tao
Format: Conference Proceeding
Language:English
Subjects:
Conferences
Electric potential
Lithium niobate
Mirrors
Nanoelectromechanical systems
Q-factor
Silicon compounds
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Summary:The paper reports on the micro-actuators based on 36Y-cut LiNbO 3 thin film. Two different designs of SiO 2 layer below (design 1) and above (design 2) LiNbO 3 thin film have been proposed and analyzed. The two micro-actuators both have a mirror size at 15×80 µm 2 . Through the analysis of different design parameters of micro-actuator structures, the designs of large displacement have been offered. The design 1 has a driving efficiency of 21.02 °/V at 236 kHz and design 2 has a driving efficiency of 4.11 °/V at 193 kHz. LiNbO 3 thin film based micro-actuators have been proved to have lithographically defined operating frequency and rotating displacement. Our designs show great potential for single axis rotating micro-actuators applications where high scanning angle and scalable frequency are needed.
ISSN:2474-3755
DOI:10.1109/NEMS51815.2021.9451448