Influence of the Particle Size of Glass Powder on Sintering Characteristics in TGV Packaging

In the fabrication of TGV (through glass via) reflow process, nano-glass powder is used instead of glass substrate, and the structure is filled first and then heated to reflow, which can simplify the process steps and improve the filling effect. This paper represents the preparation of nano glass po...

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Bibliographic Details
Main Authors: Liu, Yifang, Sang, Hongbo, Bu, Zhenxiang, Zhang, Yulong, Gao, Guangen, Wang, Lingyun
Format: Conference Proceeding
Language:English
Subjects:
Glass
Heating systems
Nanoelectromechanical systems
Packaging
Powders
Reliability engineering
Temperature
Online Access:Request full text
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Summary:In the fabrication of TGV (through glass via) reflow process, nano-glass powder is used instead of glass substrate, and the structure is filled first and then heated to reflow, which can simplify the process steps and improve the filling effect. This paper represents the preparation of nano glass powder for TGV, and by studying the sintering characteristics of glass powders of different sizes at different temperatures, mixing particles before sintering can accelerate the melting of larger particles, reduce the requirements for grinding process, improve bonding strength and save costs. The silicon structure is filled with the mixed powder and thermally reflowed. The reflowed glass powder can completely fill the edges of the structure and is tightly combined with the silicon.
ISSN:2474-3755
DOI:10.1109/NEMS51815.2021.9451524