Thickness effect on 1 GHz permeability of (CoFeB)-(SiO/sub 2/) films with high electrical resistivity

• Published in: IEEE transactions on magnetics 2001-07, Vol.37 (4), p.2258-2260
• Main Authors: Munakata, M., Yagi, M., Motoyama, M., Shimada, Y., Baba, M., Yamaguchi, M., Arai, K.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Deposition; Driving; Electric resistance; Exact sciences and technology; Film thickness; Inductors; Magnetic cores; Magnetic films; Magnetic materials; Magnetic permeability; Magnetic properties and materials; Magnetic properties of monolayers and thin films; Magnetic properties of surface, thin films and multilayers; Magnetic resonance; Magnetism; Permeability; Physics; Radio frequency; Soft magnetic materials; Sputtering; Synchronous; Yagi-Uda antennas
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/20.951141

Highly resistive (CoFeB)-(SiO/sub 2/) films for magnetic core of 1 GHz driving inductor were deposited on glass substrates by synchronous dual-rf magnetron sputtering. Permeability characteristics In the range of a few GHz were investigated. The thickness effect on the reciprocal of the loss factors of tan /spl delta/ (/spl mu//sub r/'//spl mu//sub r/") were investigated at 1 GHz. The film exhibited the maximum value of /spl mu//sub r/'//spl mu//sub r/" of 5.7 for film thickness d=0.1 /spl mu/m, with relative permeability of 120-150 and resonance frequency f/sub r/=1.6-1.9 GHz. The result shows good potential for magnetic core of 1 GHz driving inductor.