Radially Pleated Disk Resonator for Gyroscopic Application

In this paper, we propose a radially pleated disk resonator for gyroscopic application. The structure is made up of concentrically nested radially pleated rings that are interconnected by straight spokes, which has the potential to provide higher thermo-elastic quality factor and larger vibration am...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2021-12, Vol.30 (6), p.825-835
Main Authors: Ren, Xingjing, Zhou, Xin, Tao, Yi, Li, Qingsong, Wu, Xuezhong, Xiao, Dingbang
Format: Article
Language:English
Subjects:
Coriolis coupling
Damping
Disk resonator gyroscope
Energy dissipation
frequency tuning
Gyroscopes
quadrature frequency-modulation gyroscope
Quadratures
Resonant frequencies
Resonant frequency
Resonators
Spokes
Time constant
Tuning
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Summary:In this paper, we propose a radially pleated disk resonator for gyroscopic application. The structure is made up of concentrically nested radially pleated rings that are interconnected by straight spokes, which has the potential to provide higher thermo-elastic quality factor and larger vibration amplitude. Decaying time constant of 31 s is experimentally obtained at resonant frequency of 3 kHz. A frequency-tuning model is proposed and verified, based on which, the frequency-tuning characters of the radially pleated disk resonator are thoroughly investigated. The Coriolis coupling factor \kappa of the radially pleated disk resonator is precisely measured by constructing a concise quadrature frequency-modulation operation, which gives the values of \kappa = 0.7687 and agrees well with the calculated value of 0.7768. This work provides a new strategy for designing high performance MEMS gyroscope structure, and gives a good template for gyroscopic resonator characterization. [2021-0096]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2021.3105128