A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor With Floating Metal

A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba, Sr) TiO 3 (BST) thin film. A capacitance tunability of 44...

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Bibliographic Details
Published in:IEEE microwave and wireless components letters 2021-12, Vol.31 (12), p.1283-1286
Main Authors: Nath, Surajit Kumar, Goud, J. Pundareekam, Kongbrailatpam, Sandeep Sharma, Rajaram, Guruswamy, Raju, K. C. James
Format: Article
Language:English
Subjects:
(BaSr) TiO₃ (BST) thin film
Barium strontium titanates
Capacitance
Coplanar waveguides
equivalent circuit
Equivalent circuits
Etching
ferroelectric material
Ferroelectric materials
Ferroelectricity
Frequency ranges
Material properties
Microwave circuits
Thin films
Tunable circuits and devices
tunable microwave device
varactor
Varactor diodes
Varactors
Voltage control
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Summary:A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba, Sr) TiO 3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0-10 V over a frequency range of 1-3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (two masks).
ISSN:1531-1309
2771-957X
1558-1764
2771-9588
DOI:10.1109/LMWC.2021.3110981