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Comparison of Rigorous Coupled-Wave Analysis and Finite Difference Time Domain Method on Dielectric Gratings

Diffraction efficiency in binary grating is analyzed by using the rigorous coupled-wave analysis (RCWA) and finite difference time domain method to verify applicability of RCWA. The simulation results show that RCWA has a similar accuracy as compared to FDTD but reduces calculating time by a factor...

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Bibliographic Details
Main Authors: Jang, H. T., Yi, J. C.
Format: Conference Proceeding
Language:English
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Summary:Diffraction efficiency in binary grating is analyzed by using the rigorous coupled-wave analysis (RCWA) and finite difference time domain method to verify applicability of RCWA. The simulation results show that RCWA has a similar accuracy as compared to FDTD but reduces calculating time by a factor of approximately 50.
ISSN:2642-6102
DOI:10.1109/TENSYMP52854.2021.9550974