Microfabricated Millimeter-Wave Traveling Wave Tubes

Millimeter and sub-millimeter wave vacuum electronic devices have been of great interest for a wide variety of applications, but fabrication of the sub-wavelength structures has been a persistent challenge. We present and compare fabrication approaches including CNC micromachining, 3D printed mold e...

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Bibliographic Details
Main Authors: Joye, Colin D., Cook, Alan M., Rodgers, John C., Jaynes, Reginald L., Vlasov, Alexander N., Calame, Jeffrey P., Abe, David K., Burke, Alexander T., Petillo, John J.
Format: Conference Proceeding
Language:English
Subjects:
Conferences
Fabrication
Micromachining
Millimeter wave devices
Plasmas
Three-dimensional displays
Traveling wave tubes
Online Access:Request full text
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Summary:Millimeter and sub-millimeter wave vacuum electronic devices have been of great interest for a wide variety of applications, but fabrication of the sub-wavelength structures has been a persistent challenge. We present and compare fabrication approaches including CNC micromachining, 3D printed mold electroforming (3D PriME), and UV-photolithography for creating traveling wave tube circuits at 35, 95, 140 and 233 GHz, along with results. To date, CNC micromachining has yielded the best results up to 140 GHz.
ISSN:2576-7208
DOI:10.1109/ICOPS35962.2018.9575595