Sub-mA Threshold Current Vertical Cavity Surface Emitting Lasers with a Simple Fabrication Process

sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.

Saved in:
Bibliographic Details
Main Authors: Baker, Jack, Gillgrass, Sara, Allford, Craig P., Hentschel, Curtis, Davies, J. Iwan, Shutts, Samuel, Smowton, Peter M.
Format: Conference Proceeding
Language:English
Subjects:
Apertures
Conferences
Fabrication
manufacturing
Photonics
Planarization
Threshold current
VCSEL
Vertical cavity surface emitting lasers
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.
ISSN:2575-274X
DOI:10.1109/IPC48725.2021.9592977