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Sub-mA Threshold Current Vertical Cavity Surface Emitting Lasers with a Simple Fabrication Process

sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.

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Main Authors: Baker, Jack, Gillgrass, Sara, Allford, Craig P., Hentschel, Curtis, Davies, J. Iwan, Shutts, Samuel, Smowton, Peter M.
Format: Conference Proceeding
Language:English
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creator Baker, Jack
Gillgrass, Sara
Allford, Craig P.
Hentschel, Curtis
Davies, J. Iwan
Shutts, Samuel
Smowton, Peter M.
description sub-mA threshold currents are achieved for VCSELs using a simplified fabrication process which employs etched oxidation-vias for definition of the VCSEL aperture, as well as ease in formation of a bond pad without the need for bisbenzocyclobutane planarisation.
doi_str_mv 10.1109/IPC48725.2021.9592977
format conference_proceeding
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ispartof 2021 IEEE Photonics Conference (IPC), 2021, p.1-2
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source IEEE Xplore All Conference Series
subjects Apertures
Conferences
Fabrication
manufacturing
Photonics
Planarization
Threshold current
VCSEL
Vertical cavity surface emitting lasers
title Sub-mA Threshold Current Vertical Cavity Surface Emitting Lasers with a Simple Fabrication Process
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