Femtosecond laser-assisted wet etching of Nd:Y AG crystals for photonics waveguide fabrication

We report the effect of the pulse energy and laser beam scanning speed variation on control and intensification of the femtosecond laser-assisted wet etching of Nd:YAG crystals resulting in the fabrication of hollow tracks. Applying the optimized laser exposure parameters enables an increase of the...

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Bibliographic Details
Main Authors: Lipateva, Tatiana O., Okhrimchuk, Andrey G., Lipatiev, Alexey S., Lotarev, Sergey V., Sigaev, Vladimir N.
Format: Conference Proceeding
Language:English
Subjects:
Laser beams
Laser modes
Nd:YAG crystal
non-thermal mode
Optical device fabrication
Photonic crystals
Photonics
ultrashort pulses
waveguide
Waveguide lasers
Wet etching
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Description
Summary:We report the effect of the pulse energy and laser beam scanning speed variation on control and intensification of the femtosecond laser-assisted wet etching of Nd:YAG crystals resulting in the fabrication of hollow tracks. Applying the optimized laser exposure parameters enables an increase of the etching rates at the initial stages
ISSN:2693-8316
DOI:10.1109/PN52152.2021.9597849