Current dependent performance test used on different types of silicon field emitter arrays

A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduce...

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Bibliographic Details
Main Authors: Schels, A., Edler, S., Hansch, W., Bachmann, M., Herdl, F., Dusberg, F., Eder, M., Meyer, M., Dudek, M., Pahlke, A., Schreiner, R.
Format: Conference Proceeding
Language:English
Subjects:
Blades
Conductivity
Current measurement
Doping
Fabrication
Field emitter arrays
Geometry
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Summary:A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures.
ISSN:2380-6311
DOI:10.1109/IVNC52431.2021.9600787