10 MHz Length-Extension Mode Quartz MEMS Resonator For Frequency and Time Applications

In this paper, we present recent advances on a quartz Microelectromechanical system (MEMS) resonator. This resonator is well suited to replace standard macroscopic crystal quartz resonators in crystal oscillators combining high performances, low costs thanks to collective processes and low power con...

Full description

Saved in:
Bibliographic Details
Main Authors: Chapellier, Paul, Lavenus, Pierre, Levy, Raphael, Traon, Olivier Le
Format: Conference Proceeding
Language:English
Subjects:
Crystals
DRIE
Frequency and Time
MEMS resonator
Microelectromechanical systems
Micromechanical devices
Power demand
Process control
Quartz
Resonant frequency
Time-frequency analysis
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, we present recent advances on a quartz Microelectromechanical system (MEMS) resonator. This resonator is well suited to replace standard macroscopic crystal quartz resonators in crystal oscillators combining high performances, low costs thanks to collective processes and low power consumption in emerging applications such as Internet of Things, embedded systems or the cellular network development (5G).
ISSN:2327-1949
DOI:10.1109/EFTF/IFCS52194.2021.9604282