New method of extraction of systematic failure component

We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component....

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Bibliographic Details
Main Authors: Mitsutake, K., Ushiku, Y., Arakawa, Y., Ishibumi, T., Ito, O.
Format: Conference Proceeding
Language:English
Subjects:
Histograms
History
Indium tin oxide
Manufacturing processes
Optimization methods
Production
Productivity
Redundancy
Semiconductor device manufacture
Virtual manufacturing
Online Access:Request full text
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Summary:We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component. By combining the analysis of the degree and the position of the systematic fault with a lot history, the problem of the processes can be solved. In this way, it is possible to enhance yield and increase productivity.
DOI:10.1109/ISSM.2001.962959