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Micromachined frequency-variable impedance tuners using resonant unit cells
This paper presents a new type of micromachined impedance tuners using frequency-variable resonant unit cells. Impedance tuners using resonant unit cells realized by tunable micromachined capacitors showed a wide tuning range equivalent to almost two quadrants of the Smith chart with a high maximum...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | This paper presents a new type of micromachined impedance tuners using frequency-variable resonant unit cells. Impedance tuners using resonant unit cells realized by tunable micromachined capacitors showed a wide tuning range equivalent to almost two quadrants of the Smith chart with a high maximum VSWR of 21.2 at Ka-band. Frequency variability is also provided through the use of J-inverters with tunable capacitors. Micromachined tuners are very promising for low-loss tuning of the monolithic circuits as well as accurate noise and power characterization. |
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ISSN: | 0149-645X 2576-7216 |
DOI: | 10.1109/MWSYM.2001.966900 |