An Innovative Auxetic Electrically-Tunable Mems Mechanical Filter

An innovative Micro-Electro-Mechanical System (MEMS) electrically-tunable filter exploiting bandgap and auxetic properties of a mechanical structure is here proposed for the first time to the Authors best knowledge. It embeds a deformable structure made of a periodic repetition of an auxetic unit ce...

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Bibliographic Details
Main Authors: Zega, Valentina, Nastro, Alessandro, Ferrari, Marco, Ardito, Raffaele, Ferrari, Vittorio, Corigliano, Alberto
Format: Conference Proceeding
Language:English
Subjects:
Auxetic materials
auxetic structures
bandgap
Capacitors
Conferences
Electrodes
electrostatic capacitors
MEMS
Micromechanical devices
Photonic band gap
push-pull configuration
tunable mechanical filters
Voltage measurement
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Summary:An innovative Micro-Electro-Mechanical System (MEMS) electrically-tunable filter exploiting bandgap and auxetic properties of a mechanical structure is here proposed for the first time to the Authors best knowledge. It embeds a deformable structure made of a periodic repetition of an auxetic unit cell and four sets of push-pull parallel-plates capacitors placed on its sides. Thanks to the bandgap properties of the auxetic structure, the proposed MEMS acts as a mechanical filter in the mega-hertz range. Electrostatic-tunability is achieved through the auxeticity of the implemented unit cell: when a DC bias voltage is applied on tuning electrodes, it induces a tensile force that deforms the structure, thus shifting the bandgap opening frequency range.
ISSN:2160-1968
DOI:10.1109/MEMS51670.2022.9699733